Symposium M
Next Generation Micro/Nano Systems

Programme Chair:
Leandro LORENZELLI, Fondazione Bruno Kessler, Italy
Orlando H. AUCIELLO, University of Texas at Dallas, USA
Giuseppe BARILLARO, University of Pisa, Italy
Kukjin CHUN, Seoul National University, South Korea
Nico DE ROOIJ, EPFL, Switzerland
Chang Beom EOM, University of Wisconsin, USA
Carles FERRER, Autonomous University of Barcelona, Spain
Hiroshi FUNAKUBO, Tokyo Institute of Technology, Japan
Thomas GESSNER, Fraunhofer ENAS, Germany
Christofer HIEROLD, ETH Zurich, Switzerland
Bernhard JAKOBY, Johannes Kepler University Linz, Austria
Dong-Joo KIM, Auburn University, USA
Amit LAL, Cornell University, USA
Vincent C. LEE, National University of Singapore, Singapore
Jing-Feng LI, Tsinghua University, China
Marc J. MADOU, University of California, Irvine, USA
Christoph E. NEBEL, Fraunhofer IAF, Germany
Yves-Alain PETER, Ecole Polytechnique Montréal, Canada
Ronald POLCAWICH, US Army Research Laboratory, USA
Denis REMIENS, Université de Valenciennes, France
Jose-Luis SANCHEZ-ROJAS, University of Castilla La Mancha, Spain
Pietro SICILIANO, IMM - CNR, Italy
Osamu TABATA, Kyoto University, Japan
Susan TROLIER-McKINSTRY, Penn State University, USA
Christos TSAMIS, NCSR "Demokritos", Greece
Michael J. VELLEKOOP, University of Bremen, Germany
Zhong Lin WANG, Georgia Tech, USA
David WOOD, Durham University, UK
Gerwin GELINCK, TNO, Netherlands
Jacopo IANNACCI / Guido SORDO, Fondazione Bruno Kessler, Italy
Bernhard JAKOBY, Johannes Kepler University Linz, Austria
Paul MITCHESON, Imperial College London, UK
Mitsumasa NAKAJIMA, NTT Microsystem Integration Laboratory, Japan
Erwin PEINER, TU Braunschweig, Germany
Wolfram PERNICE / Patrik RAITH, University of Muenster, Germany
Mark RZCHOWSKI, University of Wisconsin-Madison, USA
Roberto SORRENTINO, University of Perugia, Italy
Madoka TAKAI, The University of Tokyo, Japan
Michael J. VELLEKOOP, University of Bremen, Germany
Technologies for the fabrication of devices and systems at micro- and nano-scales continue to advance and diversify due to the rising demands for miniaturisation, cost reduction, functional integration and performance enhancement coming from a number of applications including energy, transport, telecommunications, information technology, civil engineering, medicine and other important areas of our everyday life.   Nevertheless, the development of  innovative micro-nanofabrication approaches is becoming not only a technological step, but it is strongly correlated with our personal and social life.
For this reason, worldwide, scientific and technological research focused on the development and the manufacturing systems that employ nano- and micro-structures is at the forefront of scientific and economic competition.
In this context, the next generation of Micro/Nano Systems has to provide advanced functionalities through combination of innovative nanomaterials and micro- nanotechnologies, for envisaging an increasing technological development on a broad range of powerful applications addressing societal challenges.
These fast technology developments have contributed to the growth in many areas of the research (health, food, environment and ICT) where they can bring significant impact.  
If the major technological issue of the microelectronics is related to the scaling down of the critical dimensions and to reduction of the power consumption and costs,  the fully exploitation of MEMS/NEMS requires innovative concepts, advanced processes, and pioneering designs and simulation approaches for materials and devices to be integrated  in reliable, performing and cheap practical systems.
In order to satisfy all these expectations, the integration of heterogeneous micro nano-technologies with new active, responsive, and nano-engineered  materials, such as piezoelectrics, nanowires, graphene, bioactive and biodegradable ceramics and polymers, plays an important role.
The objective of the Symposium is twofold: a) to share the progress in the field and b) to identify the technological orientation and future challenges offered by the connection between innovative materials  and micro/nanotechnologies. The involvement of representatives of key research disciplines will offer a podium to enable community building and networking, the sharing of progress in both technology and application development, and the identification of common interests.

Subject matter include but is not limited to:

-Advanced materials for sensors and actuators
-Nanoscale and quantum effects
-Innovative devices and sensing principles
-Design, simulation and theoretical concepts
-Technologies for MicroNanoBioSystems (MNBS)
-System Integration and Electronics for smart sensors
-Novel lithographic and nanotechnology approaches
-Testing and reliability issues at micro/nano scales
-Innovative applications
Session Topics

M-1 Physical MEMS/NEMS

M-2 Chemical micro/nano-sensors and systems


M-4 Smart micro-nano system and components integration

M-5 Radio frequency MEMS

M-6 Energy harvesting and power supply MEMS

M-7 Micro(nano)fluidics and Lab on Chip; Bio-MEMS/NEMS

M-8 Flexible sensors technology


Cimtec 2016

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